Further Increasing the Accuracy of Characterization of a Thin Dielectric or Semiconductor Film on a Substrate from Its Interference Transmittance Spectrum

Three means are investigated for further increasing the accuracy of the characterization of a thin film on a substrate, from the transmittance spectrum T(λ) of the specimen, based on the envelope method. Firstly, it is demonstrated that the accuracy of characterization, of the average film thickness...

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Detalles Bibliográficos
Autores principales: Minkov, Dorian, Marquez, Emilio, Angelov, George, Gavrilov, Gavril, Ruano, Susana, Saugar, Elias
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8399147/
https://www.ncbi.nlm.nih.gov/pubmed/34443203
http://dx.doi.org/10.3390/ma14164681

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8399147/
https://www.ncbi.nlm.nih.gov/pubmed/34443203
http://dx.doi.org/10.3390/ma14164681

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