Fabrication of Weak C-Axis Preferred AlN Thin Film for Temperature Measurement

A weak C-axis preferred AlN thin film with a lot of defects was fabricated for temperature measurement. It was found that the (002) diffraction peak of the thin film increased monotonously with the increase in annealing temperature and annealing time. This phenomenon is ascribed to the evolution of...

Descripción completa

Detalles Bibliográficos
Autores principales: Dong, Ling, Li, Yang, Lv, Jingwen, Jiang, Hongchuan, Zhang, Wanli
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8399154/
https://www.ncbi.nlm.nih.gov/pubmed/34450787
http://dx.doi.org/10.3390/s21165345

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8399154/
https://www.ncbi.nlm.nih.gov/pubmed/34450787
http://dx.doi.org/10.3390/s21165345

Ejemplares similares