Static and Dynamic Analysis of Electrostatically Actuated MEMS Shallow Arches for Various Air-Gap Configurations

In this research, we investigate the structural behavior, including the snap-through and pull-in instabilities, of in-plane microelectromechanical COSINE-shaped and electrically actuated clamped-clamped micro-beams resonators. The work examines various electrostatic actuation patterns including unif...

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Detalles Bibliográficos
Autores principales: Ouakad, Hassen M., Alcheikh, Nouha, Younis, Mohammad I.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8399550/
https://www.ncbi.nlm.nih.gov/pubmed/34442552
http://dx.doi.org/10.3390/mi12080930

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8399550/
https://www.ncbi.nlm.nih.gov/pubmed/34442552
http://dx.doi.org/10.3390/mi12080930

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