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Readout Circuits for Capacitive Sensors

The development of microelectromechanical system (MEMS) processes enables the integration of capacitive sensors into silicon integrated circuits. These sensors have been gaining considerable attention as a solution for mobile and internet of things (IoT) devices because of their low power consumptio...

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Detalles Bibliográficos
Autores principales: Yoo, Yongsang, Choi, Byong-Deok
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8400189/
https://www.ncbi.nlm.nih.gov/pubmed/34442582
http://dx.doi.org/10.3390/mi12080960