Evaluation of Crystalline Volume Fraction of Laser-Annealed Polysilicon Thin Films Using Raman Spectroscopy and Spectroscopic Ellipsometry

We investigated the crystallinities of poly silicon (poly Si) annealed via green laser annealing (GLA) with a 532-nm pulsed laser and blue laser annealing (BLA) with 450-nm continuous-wave lasers. Three-dimensional heat transfer simulations were performed to obtain the temperature distributions in a...

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Detalles Bibliográficos
Autores principales: Pyo, Jeongsang, Lee, Bohae, Ryu, Han-Youl
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8400450/
https://www.ncbi.nlm.nih.gov/pubmed/34442621
http://dx.doi.org/10.3390/mi12080999

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8400450/
https://www.ncbi.nlm.nih.gov/pubmed/34442621
http://dx.doi.org/10.3390/mi12080999

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