Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles

The piezoelectric MEMS (micro-electro-mechanical systems) scanning mirrors are in a great demand for numerous optoelectronic applications. However, the existing actuation strategies are severely limited for poor compatibility with CMOS process, non-linear control, insufficient mirror size and small...

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Detalles Bibliográficos
Autores principales: Sun, Changhe, Liu, Yufei, Li, Bolun, Su, Wenqu, Luo, Mingzhang, Du, Guofeng, Wu, Yaming
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8401275/
https://www.ncbi.nlm.nih.gov/pubmed/34450955
http://dx.doi.org/10.3390/s21165513

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8401275/
https://www.ncbi.nlm.nih.gov/pubmed/34450955
http://dx.doi.org/10.3390/s21165513

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