Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles

The piezoelectric MEMS (micro-electro-mechanical systems) scanning mirrors are in a great demand for numerous optoelectronic applications. However, the existing actuation strategies are severely limited for poor compatibility with CMOS process, non-linear control, insufficient mirror size and small angular travel. In this paper, a novel, particularly efficient ScAlN-based piezoelectric MEMS mirror with a pupil size of 10 mm is presented. The MEMS mirror consists of a reflection mirror plate, four meandering springs with mechanical rotation transformation, and eight right-angle trapezoidal actuators designed in Union Jack-shaped form. Theoretical modeling, simulations and comparative analysis have been investigated for optimizing two different device designs. For Device A with a 1 mm-length square mirror, the orthogonal and diagonal static tilting angles are ±36.2°@200 V(DC) and ±36.2°@180 V(DC), respectively, and the dynamic tilting angles increases linearly with the driving voltage. Device B with a 10 mm-length square mirror provides the accessible tilting angles of ±36.0°@200 V(DC) and ±35.9°@180 V(DC) for horizontal and diagonal actuations, respectively. In the dynamic actuation regime, the orthogonal and diagonal tilting angles at 10 Hz are ±8.1°/V(pp) and ±8.9°/V(pp), respectively. This work confirmed that the Union Jack-shaped arrangement of trapezoidal actuators is a promising option for designing powerful optical devices.