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Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles

The piezoelectric MEMS (micro-electro-mechanical systems) scanning mirrors are in a great demand for numerous optoelectronic applications. However, the existing actuation strategies are severely limited for poor compatibility with CMOS process, non-linear control, insufficient mirror size and small...

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Detalles Bibliográficos
Autores principales:	Sun, Changhe, Liu, Yufei, Li, Bolun, Su, Wenqu, Luo, Mingzhang, Du, Guofeng, Wu, Yaming
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8401275/ https://www.ncbi.nlm.nih.gov/pubmed/34450955 http://dx.doi.org/10.3390/s21165513

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