Characterization of a PCB Based Pressure Sensor and Its Joining Methods for the Metal Membrane

Essential quality features of pressure sensors are, among other accuracy-related factors, measurement range, operating temperature, and long-term stability. In this work, these features are optimized for a capacitive pressure sensor with a measurement range of 10 bars. The sensor consists of a metal...

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Detalles Bibliográficos
Autores principales: Schwenck, Adrian, Grözinger, Tobias, Günther, Thomas, Schumacher, Axel, Schuhmacher, Dietmar, Werum, Kai, Zimmermann, André
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8402279/
https://www.ncbi.nlm.nih.gov/pubmed/34450995
http://dx.doi.org/10.3390/s21165557

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8402279/
https://www.ncbi.nlm.nih.gov/pubmed/34450995
http://dx.doi.org/10.3390/s21165557

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