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Characterization of a PCB Based Pressure Sensor and Its Joining Methods for the Metal Membrane
Essential quality features of pressure sensors are, among other accuracy-related factors, measurement range, operating temperature, and long-term stability. In this work, these features are optimized for a capacitive pressure sensor with a measurement range of 10 bars. The sensor consists of a metal...
Autores principales: | Schwenck, Adrian, Grözinger, Tobias, Günther, Thomas, Schumacher, Axel, Schuhmacher, Dietmar, Werum, Kai, Zimmermann, André |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8402279/ https://www.ncbi.nlm.nih.gov/pubmed/34450995 http://dx.doi.org/10.3390/s21165557 |
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