Cargando…
Lateral resolution limit of laser Doppler vibrometer microscopes for the measurement of surface acoustic waves
The lateral or transverse resolution of single-point interferometers for vibration measurement is especially critical for microelectromechanical systems (MEMS) vibrating up to the gigahertz range. In this regime, the acoustic wavelengths are typically in the range of the size of the laser focus. Thu...
| Autores principales: | , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2021
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8423847/ https://www.ncbi.nlm.nih.gov/pubmed/34493748 http://dx.doi.org/10.1038/s41598-021-96684-y |