Smart-cut-like laser slicing of GaN substrate using its own nitrogen

We have investigated the possibility of applying lasers to slice GaN substrates. Using a sub-nanosecond laser with a wavelength of 532 nm, we succeeded in slicing GaN substrates. In the laser slicing method used in this study, there was almost no kerf loss, and the thickness of the layer damaged by...

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Detalles Bibliográficos
Autores principales: Tanaka, Atsushi, Sugiura, Ryuji, Kawaguchi, Daisuke, Yui, Toshiki, Wani, Yotaro, Aratani, Tomomi, Watanabe, Hirotaka, Sena, Hadi, Honda, Yoshio, Igasaki, Yasunori, Amano, Hiroshi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8429715/
https://www.ncbi.nlm.nih.gov/pubmed/34504143
http://dx.doi.org/10.1038/s41598-021-97159-w

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8429715/
https://www.ncbi.nlm.nih.gov/pubmed/34504143
http://dx.doi.org/10.1038/s41598-021-97159-w

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