Novel resonant pressure sensor based on piezoresistive detection and symmetrical in-plane mode vibration

In this paper, a novel resonant pressure sensor is developed based on electrostatic excitation and piezoresistive detection. The measured pressure applied to the diaphragm will cause the resonant frequency shift of the resonator. The working mode stress–frequency theory of a double-ended tuning fork...

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Detalles Bibliográficos
Autores principales: Han, Xiangguang, Mao, Qi, Zhao, Libo, Li, Xuejiao, Wang, Li, Yang, Ping, Lu, Dejiang, Wang, Yonglu, Yan, Xin, Wang, Songli, Zhu, Nan, Jiang, Zhuangde
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433135/
https://www.ncbi.nlm.nih.gov/pubmed/34567705
http://dx.doi.org/10.1038/s41378-020-00207-0

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433135/
https://www.ncbi.nlm.nih.gov/pubmed/34567705
http://dx.doi.org/10.1038/s41378-020-00207-0

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