Cargando…
Novel resonant pressure sensor based on piezoresistive detection and symmetrical in-plane mode vibration
In this paper, a novel resonant pressure sensor is developed based on electrostatic excitation and piezoresistive detection. The measured pressure applied to the diaphragm will cause the resonant frequency shift of the resonator. The working mode stress–frequency theory of a double-ended tuning fork...
| Autores principales: | , , , , , , , , , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2020
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433135/ https://www.ncbi.nlm.nih.gov/pubmed/34567705 http://dx.doi.org/10.1038/s41378-020-00207-0 |