A tunable ferroelectric based unreleased RF resonator

This paper introduces the first tunable ferroelectric capacitor (FeCAP)-based unreleased RF MEMS resonator, integrated seamlessly in Texas Instruments’ 130 nm Ferroelectric RAM (FeRAM) technology. The designs presented here are monolithically integrated in solid-state CMOS technology, with no post-p...

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Detalles Bibliográficos
Autores principales: He, Yanbo, Bahr, Bichoy, Si, Mengwei, Ye, Peide, Weinstein, Dana
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433143/
https://www.ncbi.nlm.nih.gov/pubmed/34567623
http://dx.doi.org/10.1038/s41378-019-0110-1

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433143/
https://www.ncbi.nlm.nih.gov/pubmed/34567623
http://dx.doi.org/10.1038/s41378-019-0110-1

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