Field-emission electron gun for a MEMS electron microscope

This article presents a field-emission electron gun intended for use in a MEMS (microelectromechanical system) electron microscope. Its fabrication process follows the technology of a miniature device under development built from silicon electrodes and glass spacers. The electron gun contains a sili...

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Detalles Bibliográficos
Autor principal: Krysztof, Michał
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433145/
https://www.ncbi.nlm.nih.gov/pubmed/34567756
http://dx.doi.org/10.1038/s41378-021-00268-9

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433145/
https://www.ncbi.nlm.nih.gov/pubmed/34567756
http://dx.doi.org/10.1038/s41378-021-00268-9

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