Cargando…
Field-emission electron gun for a MEMS electron microscope
This article presents a field-emission electron gun intended for use in a MEMS (microelectromechanical system) electron microscope. Its fabrication process follows the technology of a miniature device under development built from silicon electrodes and glass spacers. The electron gun contains a sili...
| Autor principal: | |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2021
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433145/ https://www.ncbi.nlm.nih.gov/pubmed/34567756 http://dx.doi.org/10.1038/s41378-021-00268-9 |