Capillary-force-induced collapse lithography for controlled plasmonic nanogap structures

The capillary force effect is one of the most important fabrication parameters that must be considered at the micro/nanoscale because it is strong enough to deform micro/nanostructures. However, the deformation of micro/nanostructures due to such capillary forces (e.g., stiction and collapse) has be...

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Detalles Bibliográficos
Autores principales: Kim, Inki, Mun, Jungho, Hwang, Wooseup, Yang, Younghwan, Rho, Junsuk
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433176/
https://www.ncbi.nlm.nih.gov/pubmed/34567676
http://dx.doi.org/10.1038/s41378-020-0177-8

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433176/
https://www.ncbi.nlm.nih.gov/pubmed/34567676
http://dx.doi.org/10.1038/s41378-020-0177-8

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