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Capillary-force-induced collapse lithography for controlled plasmonic nanogap structures
The capillary force effect is one of the most important fabrication parameters that must be considered at the micro/nanoscale because it is strong enough to deform micro/nanostructures. However, the deformation of micro/nanostructures due to such capillary forces (e.g., stiction and collapse) has be...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433176/ https://www.ncbi.nlm.nih.gov/pubmed/34567676 http://dx.doi.org/10.1038/s41378-020-0177-8 |