Demonstration of tantalum as a structural material for MEMS thermal actuators

This work demonstrates the processing, modeling, and characterization of nanocrystalline refractory metal tantalum (Ta) as a new structural material for microelectromechanical system (MEMS) thermal actuators (TAs). Nanocrystalline Ta films have a coefficient of thermal expansion (CTE) and Young’s mo...

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Detalles Bibliográficos
Autores principales: Ni, Longchang, Pocratsky, Ryan M., de Boer, Maarten P.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433199/
https://www.ncbi.nlm.nih.gov/pubmed/34567724
http://dx.doi.org/10.1038/s41378-020-00232-z

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433199/
https://www.ncbi.nlm.nih.gov/pubmed/34567724
http://dx.doi.org/10.1038/s41378-020-00232-z

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