Coulomb-actuated microbeams revisited: experimental and numerical modal decomposition of the saddle-node bifurcation

Electrostatic micromechanical actuators have numerous applications in science and technology. In many applications, they are operated in a narrow frequency range close to resonance and at a drive voltage of low variation. Recently, new applications, such as microelectromechanical systems (MEMS) micr...

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Detalles Bibliográficos
Autores principales: Melnikov, Anton, Schenk, Hermann A. G., Monsalve, Jorge M., Wall, Franziska, Stolz, Michael, Mrosk, Andreas, Langa, Sergiu, Kaiser, Bert
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433289/
https://www.ncbi.nlm.nih.gov/pubmed/34567755
http://dx.doi.org/10.1038/s41378-021-00265-y

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433289/
https://www.ncbi.nlm.nih.gov/pubmed/34567755
http://dx.doi.org/10.1038/s41378-021-00265-y

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