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Coulomb-actuated microbeams revisited: experimental and numerical modal decomposition of the saddle-node bifurcation
Electrostatic micromechanical actuators have numerous applications in science and technology. In many applications, they are operated in a narrow frequency range close to resonance and at a drive voltage of low variation. Recently, new applications, such as microelectromechanical systems (MEMS) micr...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433289/ https://www.ncbi.nlm.nih.gov/pubmed/34567755 http://dx.doi.org/10.1038/s41378-021-00265-y |