Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications

Graphene’s unparalleled strength, chemical stability, ultimate surface-to-volume ratio and excellent electronic properties make it an ideal candidate as a material for membranes in micro- and nanoelectromechanical systems (MEMS and NEMS). However, the integration of graphene into MEMS or NEMS device...

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Detalles Bibliográficos
Autores principales: Fan, Xuge, Smith, Anderson D., Forsberg, Fredrik, Wagner, Stefan, Schröder, Stephan, Akbari, Sayedeh Shirin Afyouni, Fischer, Andreas C., Villanueva, Luis Guillermo, Östling, Mikael, Lemme, Max C., Niklaus, Frank
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433294/
https://www.ncbi.nlm.nih.gov/pubmed/34567632
http://dx.doi.org/10.1038/s41378-019-0128-4

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433294/
https://www.ncbi.nlm.nih.gov/pubmed/34567632
http://dx.doi.org/10.1038/s41378-019-0128-4

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