Investigation of a complete squeeze-film damping model for MEMS devices

Dynamic performance has long been critical for micro-electro-mechanical system (MEMS) devices and is significantly affected by damping. Different structural vibration conditions lead to different damping effects, including border and amplitude effects, which represent the effect of gas flowing aroun...

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Detalles Bibliográficos
Autores principales: Lu, Qianbo, Fang, Weidong, Wang, Chen, Bai, Jian, Yao, Yuan, Chen, Jiaxiao, Xu, Xiang, Huang, Wei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433295/
https://www.ncbi.nlm.nih.gov/pubmed/34567767
http://dx.doi.org/10.1038/s41378-021-00279-6

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433295/
https://www.ncbi.nlm.nih.gov/pubmed/34567767
http://dx.doi.org/10.1038/s41378-021-00279-6

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