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MEMS development focusing on collaboration using common facilities: a retrospective view and future directions
I have been developing MEMS (microelectromechanical systems) technology and supporting the industry through collaboration. A facility was built in house on a 20 mm square wafer for use in prototyping MEMS and ICs (integrated circuits). The constructed MEMS devices include commercialized integrated c...
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group UK
2021
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433356/ https://www.ncbi.nlm.nih.gov/pubmed/34567772 http://dx.doi.org/10.1038/s41378-021-00290-x |