UV-LED projection photolithography for high-resolution functional photonic components

The advancement of micro- and nanostructuring techniques in optics is driven by the demand for continuous miniaturization and the high geometrical accuracy of photonic devices and integrated systems. Here, UV-LED projection photolithography is demonstrated as a simple and low-cost approach for rapid...

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Detalles Bibliográficos
Autores principales: Zheng, Lei, Zywietz, Urs, Birr, Tobias, Duderstadt, Martin, Overmeyer, Ludger, Roth, Bernhard, Reinhardt, Carsten
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433360/
https://www.ncbi.nlm.nih.gov/pubmed/34567776
http://dx.doi.org/10.1038/s41378-021-00286-7

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433360/
https://www.ncbi.nlm.nih.gov/pubmed/34567776
http://dx.doi.org/10.1038/s41378-021-00286-7

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