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Extending the resolution limits of nanoshape imprint lithography using molecular dynamics of polymer crosslinking

Emerging nanoscale applications in energy, electronics, optics, and medicine can exhibit enhanced performance by incorporating nanoshaped structures (nanoshape structures here are defined as shapes enabled by sharp corners with radius of curvature < 5 nm). Nanoshaped fabrication at high-throughpu...

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Detalles Bibliográficos
Autores principales: Cherala, Anshuman, Pandya, Parth N., Liechti, Kenneth M., Sreenivasan, S. V.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433368/
https://www.ncbi.nlm.nih.gov/pubmed/34567728
http://dx.doi.org/10.1038/s41378-020-00225-y