Polarized holographic lithography system for high-uniformity microscale patterning with periodic tunability

Periodic microscale array structures play an important role in diverse applications involving photonic crystals and diffraction gratings. A polarized holographic lithography system is proposed for patterning high-uniformity microscale two-dimensional crossed-grating structures with periodic tunabili...

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Detalles Bibliográficos
Autores principales: Xue, Gaopeng, Zhai, Qihang, Lu, Haiou, Zhou, Qian, Ni, Kai, Lin, Liyu, Wang, Xiaohao, Li, Xinghui
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433444/
https://www.ncbi.nlm.nih.gov/pubmed/34567745
http://dx.doi.org/10.1038/s41378-021-00256-z

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433444/
https://www.ncbi.nlm.nih.gov/pubmed/34567745
http://dx.doi.org/10.1038/s41378-021-00256-z

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