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Polarized holographic lithography system for high-uniformity microscale patterning with periodic tunability
Periodic microscale array structures play an important role in diverse applications involving photonic crystals and diffraction gratings. A polarized holographic lithography system is proposed for patterning high-uniformity microscale two-dimensional crossed-grating structures with periodic tunabili...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433444/ https://www.ncbi.nlm.nih.gov/pubmed/34567745 http://dx.doi.org/10.1038/s41378-021-00256-z |