MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies

MEMS inductors are used in a wide range of applications in micro- and nanotechnology, including RF MEMS, sensors, power electronics, and Bio-MEMS. Fabrication technologies set the boundary conditions for inductor design and their electrical and mechanical performance. This review provides a comprehe...

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Detalles Bibliográficos
Autores principales: Le, Hoa Thanh, Haque, Rubaiyet I., Ouyang, Ziwei, Lee, Seung Woo, Fried, Shelley I., Zhao, Ding, Qiu, Min, Han, Anpan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2021
Materias:
Review Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433479/
https://www.ncbi.nlm.nih.gov/pubmed/34567771
http://dx.doi.org/10.1038/s41378-021-00275-w

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433479/
https://www.ncbi.nlm.nih.gov/pubmed/34567771
http://dx.doi.org/10.1038/s41378-021-00275-w

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