Silicon Based Coplanar Capacitive Device for Liquid Sensor Applications

The development of silicon-based sensor devices has enabled the possibility to pursue novel integrated smart sensor technologies. Under this scenario, capacitive sensor devices are one viable option for implementing different kinds of applications. In this paper, an interdigitated coplanar capacitiv...

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Detalles Bibliográficos
Autores principales: Martinez-Lopez, Andrea G., Guzmán-Caballero, David E., Mejia, Israel, Tinoco, Julio C.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8434668/
https://www.ncbi.nlm.nih.gov/pubmed/34502849
http://dx.doi.org/10.3390/s21175958

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8434668/
https://www.ncbi.nlm.nih.gov/pubmed/34502849
http://dx.doi.org/10.3390/s21175958

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