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Is the Ne operation of the helium ion microscope suitable for electron backscatter diffraction sample preparation?
Electron backscatter diffraction (EBSD) is a powerful characterization technique which allows the study of microstructure, grain size, and orientation as well as strain of a crystallographic sample. In addition, the technique can be used for phase analysis. A mirror-flat sample surface is required f...
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Beilstein-Institut
2021
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8450971/ https://www.ncbi.nlm.nih.gov/pubmed/34621610 http://dx.doi.org/10.3762/bjnano.12.73 |