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Is the Ne operation of the helium ion microscope suitable for electron backscatter diffraction sample preparation?

Electron backscatter diffraction (EBSD) is a powerful characterization technique which allows the study of microstructure, grain size, and orientation as well as strain of a crystallographic sample. In addition, the technique can be used for phase analysis. A mirror-flat sample surface is required f...

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Detalles Bibliográficos
Autor principal:	Wolff, Annalena
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Beilstein-Institut 2021
Materias:	Full Research Paper
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8450971/ https://www.ncbi.nlm.nih.gov/pubmed/34621610 http://dx.doi.org/10.3762/bjnano.12.73

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