The Fabrication and Indentation of Cubic Silicon Carbide Diaphragm for Acoustic Sensing

In this study, 550 nm thick cubic silicon carbide square diaphragms were back etched from Si substrate. Then, indentation was carried out to samples with varying dimensions, indentation locations, and loads. The influence of three parameters is documented by analyzing load-displacement curves. It wa...

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Detalles Bibliográficos
Autores principales: Zawawi, Siti Aisyah, Hamzah, Azrul Azlan, Majlis, Burhanuddin Yeop, Mohd-Yasin, Faisal
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8465934/
https://www.ncbi.nlm.nih.gov/pubmed/34577744
http://dx.doi.org/10.3390/mi12091101

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8465934/
https://www.ncbi.nlm.nih.gov/pubmed/34577744
http://dx.doi.org/10.3390/mi12091101

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