A Piezoresistive Pressure Sensor with Optimized Positions and Thickness of Piezoresistors

In this paper, a piezoresistive pressure sensor based on silicon on insulator (SOI) was presented, which was composed of an SOI layer with sensing elements and a glass cap for a hermetic package. Different from its conventional counterparts, the position and thickness of the four piezoresistors was...

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Detalles Bibliográficos
Autores principales: Meng, Qinggang, Lu, Yulan, Wang, Junbo, Chen, Deyong, Chen, Jian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8469529/
https://www.ncbi.nlm.nih.gov/pubmed/34577738
http://dx.doi.org/10.3390/mi12091095

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8469529/
https://www.ncbi.nlm.nih.gov/pubmed/34577738
http://dx.doi.org/10.3390/mi12091095

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