Fabrication of Needle-Like Silicon Nanowires by Using a Nanoparticles-Assisted Bosch Process for Both High Hydrophobicity and Anti-Reflection

In this work, a modified Bosch etching process is developed to create silicon nanowires. Au nanoparticles (NPs) formed by magnetron sputtering film deposition and thermal annealing were employed as the hard mask to achieve controllable density and high aspect ratios. Such silicon nanowire exhibits t...

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Detalles Bibliográficos
Autores principales: Zhang, Zengxing, Liu, Guohua, Wang, Kaiying
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8471489/
https://www.ncbi.nlm.nih.gov/pubmed/34577653
http://dx.doi.org/10.3390/mi12091009

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8471489/
https://www.ncbi.nlm.nih.gov/pubmed/34577653
http://dx.doi.org/10.3390/mi12091009

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