Measurement of Residual Stress and Young’s Modulus on Micromachined Monocrystalline 3C-SiC Layers Grown on <111> and <100> Silicon

3C-SiC is an emerging material for MEMS systems thanks to its outstanding mechanical properties (high Young’s modulus and low density) that allow the device to be operated for a given geometry at higher frequency. The mechanical properties of this material depend strongly on the material quality, th...

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Detalles Bibliográficos
Autores principales: Sapienza, Sergio, Ferri, Matteo, Belsito, Luca, Marini, Diego, Zielinski, Marcin, La Via, Francesco, Roncaglia, Alberto
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8471790/
https://www.ncbi.nlm.nih.gov/pubmed/34577716
http://dx.doi.org/10.3390/mi12091072

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8471790/
https://www.ncbi.nlm.nih.gov/pubmed/34577716
http://dx.doi.org/10.3390/mi12091072

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