Three-Dimensional Finite Element Analysis and Characterization of Quasi-Surface Acoustic Wave Resonators

In this work, three-dimensional finite element analysis (3D FEA) of quasi-surface acoustic wave (QSAW) resonators with high accuracy is reported. The QSAW resonators consist of simple molybdenum (Mo) interdigitated transducers (IDT) on solidly mounted stacked layers of AlN/Mo/Si. Different to the SA...

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Detalles Bibliográficos
Autores principales: Chen, Wen, Zhang, Linwei, Yang, Shangshu, Jia, Wenhan, Zhang, Songsong, Gu, Yuandong, Lou, Liang, Wu, Guoqiang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8472577/
https://www.ncbi.nlm.nih.gov/pubmed/34577761
http://dx.doi.org/10.3390/mi12091118

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8472577/
https://www.ncbi.nlm.nih.gov/pubmed/34577761
http://dx.doi.org/10.3390/mi12091118

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