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Three-Dimensional Finite Element Analysis and Characterization of Quasi-Surface Acoustic Wave Resonators

In this work, three-dimensional finite element analysis (3D FEA) of quasi-surface acoustic wave (QSAW) resonators with high accuracy is reported. The QSAW resonators consist of simple molybdenum (Mo) interdigitated transducers (IDT) on solidly mounted stacked layers of AlN/Mo/Si. Different to the SA...

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Detalles Bibliográficos
Autores principales:	Chen, Wen, Zhang, Linwei, Yang, Shangshu, Jia, Wenhan, Zhang, Songsong, Gu, Yuandong, Lou, Liang, Wu, Guoqiang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8472577/ https://www.ncbi.nlm.nih.gov/pubmed/34577761 http://dx.doi.org/10.3390/mi12091118

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