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Positioning Performance of a Sub-Arc-Second Micro-Drive Rotary System

In the macro/micro dual-drive rotary system, the micro-drive system compensates for the position error of the macro-drive system. To realize the sub-arc-second (i.e., level of 1″–0.1″) positioning of the macro/micro dual-drive rotary system, it is necessary to study the positioning performance of th...

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Detalles Bibliográficos
Autores principales: Yang, Manzhi, Lv, Zhenyang, Zhang, Chuanwei, Yang, Yizhi, Jing, Gang, Guo, Wei, Lu, Zhengxiong, Huang, Yumei, Wei, Kaiyang, Li, Linyue, Feng, Bin, Ge, Hongyu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8472757/
https://www.ncbi.nlm.nih.gov/pubmed/34577706
http://dx.doi.org/10.3390/mi12091063