An Array of On-Chip Integrated, Individually Addressable Capacitive Field-Effect Sensors with Control Gate: Design and Modelling

The on-chip integration of multiple biochemical sensors based on field-effect electrolyte-insulator-semiconductor capacitors (EISCAP) is challenging due to technological difficulties in realization of electrically isolated EISCAPs on the same Si chip. In this work, we present a new simple design for...

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Detalles Bibliográficos
Autores principales: Poghossian, Arshak, Welden, Rene, Buniatyan, Vahe V., Schöning, Michael J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8473037/
https://www.ncbi.nlm.nih.gov/pubmed/34577368
http://dx.doi.org/10.3390/s21186161

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8473037/
https://www.ncbi.nlm.nih.gov/pubmed/34577368
http://dx.doi.org/10.3390/s21186161

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