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Introducing Water Electrolithography

[Image: see text] High-resolution patterning with remarkable customizability has stimulated the invention of numerous scanning probe lithography (SPL) techniques. However, frequent tip damage, substrate-film deterioration, low throughput, and debris amassing in the patterned region are the inherent...

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Detalles Bibliográficos
Autores principales: Kumar, Sumit, Abraham, Ebinesh, Kumar, Praveen, Pratap, Rudra
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2021
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8495873/
https://www.ncbi.nlm.nih.gov/pubmed/34632225
http://dx.doi.org/10.1021/acsomega.1c03858