Silicon Nitride and Hydrogenated Silicon Nitride Thin Films: A Review of Fabrication Methods and Applications

Silicon nitride (SiNx) and hydrogenated silicon nitride (SiNx:H) thin films enjoy widespread scientific interest across multiple application fields. Exceptional combination of optical, mechanical, and thermal properties allows for their utilization in several industries, from solar and semiconductor...

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Detalles Bibliográficos
Autores principales: Hegedüs, Nikolett, Balázsi, Katalin, Balázsi, Csaba
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8510430/
https://www.ncbi.nlm.nih.gov/pubmed/34640056
http://dx.doi.org/10.3390/ma14195658

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8510430/
https://www.ncbi.nlm.nih.gov/pubmed/34640056
http://dx.doi.org/10.3390/ma14195658

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