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Silicon Nitride and Hydrogenated Silicon Nitride Thin Films: A Review of Fabrication Methods and Applications

Silicon nitride (SiNx) and hydrogenated silicon nitride (SiNx:H) thin films enjoy widespread scientific interest across multiple application fields. Exceptional combination of optical, mechanical, and thermal properties allows for their utilization in several industries, from solar and semiconductor...

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Detalles Bibliográficos
Autores principales:	Hegedüs, Nikolett, Balázsi, Katalin, Balázsi, Csaba
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Review
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8510430/ https://www.ncbi.nlm.nih.gov/pubmed/34640056 http://dx.doi.org/10.3390/ma14195658

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