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Interface Engineering of TiO(2) Photoelectrode Coatings Grown by Atomic Layer Deposition on Silicon

[Image: see text] Titanium dioxide (TiO(2)) can protect photoelectrochemical (PEC) devices from corrosion, but the fabrication of high-quality TiO(2) coatings providing long-term stability has remained challenging. Here, we compare the influence of Si wafer cleaning and postdeposition annealing temp...

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Detalles Bibliográficos
Autores principales: Saari, Jesse, Ali-Löytty, Harri, Honkanen, Mari, Tukiainen, Antti, Lahtonen, Kimmo, Valden, Mika
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2021
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8529674/
https://www.ncbi.nlm.nih.gov/pubmed/34693171
http://dx.doi.org/10.1021/acsomega.1c04478