The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind Turbine

In this paper we report on the improvement of performance by minimizing scallop size through deep reactive-ion etching (DRIE) of rotors in micro-wind turbines based on micro-electro-mechanical systems (MEMS) technology. The surface profile of an MEMS rotor can be controlled by modifying the scallop...

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Detalles Bibliográficos
Autores principales: Choi, Young Chan, Kim, June Soo, Kwon, Soon Yeol, Kong, Seong Ho
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8537036/
https://www.ncbi.nlm.nih.gov/pubmed/34683313
http://dx.doi.org/10.3390/mi12101261

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8537036/
https://www.ncbi.nlm.nih.gov/pubmed/34683313
http://dx.doi.org/10.3390/mi12101261

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