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The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind Turbine

In this paper we report on the improvement of performance by minimizing scallop size through deep reactive-ion etching (DRIE) of rotors in micro-wind turbines based on micro-electro-mechanical systems (MEMS) technology. The surface profile of an MEMS rotor can be controlled by modifying the scallop...

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Detalles Bibliográficos
Autores principales: Choi, Young Chan, Kim, June Soo, Kwon, Soon Yeol, Kong, Seong Ho
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8537036/
https://www.ncbi.nlm.nih.gov/pubmed/34683313
http://dx.doi.org/10.3390/mi12101261
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author Choi, Young Chan
Kim, June Soo
Kwon, Soon Yeol
Kong, Seong Ho
author_facet Choi, Young Chan
Kim, June Soo
Kwon, Soon Yeol
Kong, Seong Ho
author_sort Choi, Young Chan
collection PubMed
description In this paper we report on the improvement of performance by minimizing scallop size through deep reactive-ion etching (DRIE) of rotors in micro-wind turbines based on micro-electro-mechanical systems (MEMS) technology. The surface profile of an MEMS rotor can be controlled by modifying the scallop size of the DRIE surface through changing the process recipe. The fabrication of a planar disk-type MEMS rotor through the MEMS fabrication process was carried out, and for the comparison of the improvements in the performance of each rotor, RPM testing and open circuit output voltage experiments of stators and permanent magnets were performed. We found that the smooth etching profile with a minimized scallop size formed using DRIE results in improved rotation properties in MEMS-based wind turbine rotors.
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spelling pubmed-85370362021-10-24 The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind Turbine Choi, Young Chan Kim, June Soo Kwon, Soon Yeol Kong, Seong Ho Micromachines (Basel) Article In this paper we report on the improvement of performance by minimizing scallop size through deep reactive-ion etching (DRIE) of rotors in micro-wind turbines based on micro-electro-mechanical systems (MEMS) technology. The surface profile of an MEMS rotor can be controlled by modifying the scallop size of the DRIE surface through changing the process recipe. The fabrication of a planar disk-type MEMS rotor through the MEMS fabrication process was carried out, and for the comparison of the improvements in the performance of each rotor, RPM testing and open circuit output voltage experiments of stators and permanent magnets were performed. We found that the smooth etching profile with a minimized scallop size formed using DRIE results in improved rotation properties in MEMS-based wind turbine rotors. MDPI 2021-10-17 /pmc/articles/PMC8537036/ /pubmed/34683313 http://dx.doi.org/10.3390/mi12101261 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Choi, Young Chan
Kim, June Soo
Kwon, Soon Yeol
Kong, Seong Ho
The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind Turbine
title The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind Turbine
title_full The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind Turbine
title_fullStr The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind Turbine
title_full_unstemmed The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind Turbine
title_short The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind Turbine
title_sort improvement of performance through minimizing scallop size in mems based micro wind turbine
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8537036/
https://www.ncbi.nlm.nih.gov/pubmed/34683313
http://dx.doi.org/10.3390/mi12101261
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