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The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind Turbine
In this paper we report on the improvement of performance by minimizing scallop size through deep reactive-ion etching (DRIE) of rotors in micro-wind turbines based on micro-electro-mechanical systems (MEMS) technology. The surface profile of an MEMS rotor can be controlled by modifying the scallop...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8537036/ https://www.ncbi.nlm.nih.gov/pubmed/34683313 http://dx.doi.org/10.3390/mi12101261 |
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author | Choi, Young Chan Kim, June Soo Kwon, Soon Yeol Kong, Seong Ho |
author_facet | Choi, Young Chan Kim, June Soo Kwon, Soon Yeol Kong, Seong Ho |
author_sort | Choi, Young Chan |
collection | PubMed |
description | In this paper we report on the improvement of performance by minimizing scallop size through deep reactive-ion etching (DRIE) of rotors in micro-wind turbines based on micro-electro-mechanical systems (MEMS) technology. The surface profile of an MEMS rotor can be controlled by modifying the scallop size of the DRIE surface through changing the process recipe. The fabrication of a planar disk-type MEMS rotor through the MEMS fabrication process was carried out, and for the comparison of the improvements in the performance of each rotor, RPM testing and open circuit output voltage experiments of stators and permanent magnets were performed. We found that the smooth etching profile with a minimized scallop size formed using DRIE results in improved rotation properties in MEMS-based wind turbine rotors. |
format | Online Article Text |
id | pubmed-8537036 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2021 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-85370362021-10-24 The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind Turbine Choi, Young Chan Kim, June Soo Kwon, Soon Yeol Kong, Seong Ho Micromachines (Basel) Article In this paper we report on the improvement of performance by minimizing scallop size through deep reactive-ion etching (DRIE) of rotors in micro-wind turbines based on micro-electro-mechanical systems (MEMS) technology. The surface profile of an MEMS rotor can be controlled by modifying the scallop size of the DRIE surface through changing the process recipe. The fabrication of a planar disk-type MEMS rotor through the MEMS fabrication process was carried out, and for the comparison of the improvements in the performance of each rotor, RPM testing and open circuit output voltage experiments of stators and permanent magnets were performed. We found that the smooth etching profile with a minimized scallop size formed using DRIE results in improved rotation properties in MEMS-based wind turbine rotors. MDPI 2021-10-17 /pmc/articles/PMC8537036/ /pubmed/34683313 http://dx.doi.org/10.3390/mi12101261 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Choi, Young Chan Kim, June Soo Kwon, Soon Yeol Kong, Seong Ho The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind Turbine |
title | The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind Turbine |
title_full | The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind Turbine |
title_fullStr | The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind Turbine |
title_full_unstemmed | The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind Turbine |
title_short | The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind Turbine |
title_sort | improvement of performance through minimizing scallop size in mems based micro wind turbine |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8537036/ https://www.ncbi.nlm.nih.gov/pubmed/34683313 http://dx.doi.org/10.3390/mi12101261 |
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