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Fabrication of Highly Porous and Pure Zinc Oxide Films Using Modified DC Magnetron Sputtering and Post-Oxidation

Porous films of metals and metal oxides exhibit larger surface areas and higher reactivities than those of dense films. Therefore, they have gained growing attention as potential materials for use in various applications. This study reports the use of a modified direct current magnetron sputtering m...

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Detalles Bibliográficos
Autores principales: Park, Se-Yong, Rho, Soon-Ho, Lee, Hwan-Seok, Kim, Kyoung-Min, Lee, Hee-Chul
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8539006/
https://www.ncbi.nlm.nih.gov/pubmed/34683703
http://dx.doi.org/10.3390/ma14206112