Mechanical Synchronization of MEMS Electrostatically Driven Coupled Beam Filters

Micro-electromechanical systems (MEMS) bandpass filters based on arrays of electrostatically driven coupled beams have been demonstrated at MHz frequencies. High performance follows from the high Q-factor of mechanical resonators, and electrostatic transduction allows tuning, matching and actuation....

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Detalles Bibliográficos
Autores principales: Syms, Richard, Bouchaala, Adam
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8539592/
https://www.ncbi.nlm.nih.gov/pubmed/34683242
http://dx.doi.org/10.3390/mi12101191

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8539592/
https://www.ncbi.nlm.nih.gov/pubmed/34683242
http://dx.doi.org/10.3390/mi12101191

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