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Improvement and Optimization of Electromagnetic Integrated Scanning Micromirror

In this paper, the effect of driving system on working performance of electromagnetic integrated scanning micromirror (ISM) is studied. To further improve the optimization design of the electromagnetic ISM, the detailed theoretical analysis, simulation analysis, and experimental test are carried out...

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Detalles Bibliográficos
Autores principales: Chen, Liang, Gu, Wenwen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8539728/
https://www.ncbi.nlm.nih.gov/pubmed/34683264
http://dx.doi.org/10.3390/mi12101213